Key semiconductor processes for CVD, PVD and Etch toolsets require elevated temperatures in vacuum environments. Critical specifications for the thermal environment include precision temperature uniformity, precision mechanical tolerances, material selection with the chemical process conditions and no potential for contamination sources.

OSA is a Far East leading edge company that has over 12 years experience designing, building new and refurbishing PVD, CVD, and Etch process kits in our Class 1,000 Clean Room. We are OEM certified and fully vertically integrated with the ability to fully test, inspect, disassemble and restore OEM supplied Heater Pedestals to the exact compliance of a new process kit. In addition, we can supply new systems to the original company exact OEM specifications.

With our years of experience, we also work very closely with customers to design kits with improved yield and longer MBTF enabling end users to extend the refurbishment life of these systems.

We offer Heaters and Pedestals for the following OEM’s:

• Applied Materials
• Novellus-Lam

Please contact us directly if you cannot find your specific OEM number as we are constantly adding new systems to our product portfolio.