ACS’s engineering teams have several decades of working with customers to reverse engineer existing components for copy exact, high quality replacements, as well as to redesign the components for improved functionality in a wide variety of customer specific applications.

We offer engineered chamber solutions for a wide variety of critical components including: Electro-Static Chucks (new and refurbished), O-Rings, Bonded Doors, Custom Designed Tunnels, Heaters and Pedestals (New and Refurbished), Showerheads, Metal components, and Single Wafer Parts for 150 mm/200mm/300 mm Etch/PVD/SVD equipment.

We provide copy exact OPDM (Original Products and Design Manufactured) Spare parts that are used in a wide variety of OEM equipment including: Applied Materials, Novellus, LAM, TEL, Mattson, etc. We have an extensive list of non-proprietary, off-the-shelf spare parts that are sourced from the original part manufacturers. Please identify your OEM number and we will cross match it with our OPDM part number directory.

In addition, ACS offers full-service engineering support for custom designed solutions to meet the unique needs of our customers.

ACS believes in a strong partnership with our customers where we build trust in every aspect of the relationship and adhere to the highest ethical standards in our business conduct.

Our objective is to be your strategic partner in sourcing the highest quality and most cost effective spare components from “End of Warranty through End of Life.”