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Advanced Chamber Solutions supplies a complete line of high-quality, reverse engineered, spare parts for the Single Wafer Semiconductor Industry.

ACS supports a wide range of OEM’s including:

• AMAT
• TEL
• LAM
• Novellus
• Mattson
• Other OEMS (Please contact ACS with specific OEM requirements)

 

ACS offers a wide variety of advanced material choices for these components including:

• 99.8% alumina

Quartz

• GE 124/Feilihwa

Silicon: Solar Advanced Materials grows its own high purity silicon ingots in multiple locations in the Far East.

• Si Datasheet

• CVD Silicon Carbide
• Other advanced materials