Advanced Chamber Solutions offers a wide variety of sealing solutions in various standard sizes and elastomeric materials for the semiconductor industry.

Our standard O-ring list is in AS568, JIS and Metric specifications with a variety of polymer bases such as EPDM, Silicone, Fluorosilicone, Fluorocarbons, Perfluoroelastomers and FKKM high end materials.

Bonded Doors and Slit Valve Doors are a critical component of many semi-conductor process tools. They create a barrier between the aggressive process atmospheres and the non-reactive areas of the toolsets. Demands for plasma resistance and high purity have resulted in the development of a complete line of EKK elastomer’s.

Custom and special designs may be manufactured to fit your equipment requirements or can be uniquely designed by our engineering staff to meet your utmost vigorous semiconductor process application conditions. For an expedient technical review and response, please send us a fax or e-mail detailing your process data as applicable to your sealing requirements.

ACS provides OEM products at direct source pricing, as well as specially engineered solutions with an unequaled range of elastomer materials engineered specifically for the sealing applications in aggressive semiconductor systems.